Does anyone have any knowledge of other etch stop layers for silicon DRIE,
besides SiO2 and Al? We have an Adixen system and for my process it would
save extra work to have something else as etch stop layer (not Al or SiO2).

Sebastian Sosin
Address: Delft University of Technology, Mekelweg 4, Room LB 01.380
2628 CD DELFT, the Netherlands
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