Hello,

The researchers at VTT, Finland, have done some work on using Al2O3 as a
masking layer for DRIE, follow the link below:

http://www.vtt.fi/vtt_search.jsp?target=julk&form=lse&search=(cn%3D23787%20OR%20
au%3DPuurunen%2C+Riikka)

Recently, they also had a paper at Eurosensors 2008, Dresden, Germany,
titled: FIB Direct Write of ALD Al2O3 Mask for Silicon DRIE.

Vijay
DIMES, TU Delft, NL