Aravind-

The Washington Technology Center (http://www.wtc.washington.edu)
is supporting some MEMS programs in Seattle, and there are at
least 2 programs involving PZT.

The PIs for the 2 programs are listed below.  I believe these are both
Sol-Gel techniques.

Amit Bandyopadhyay, Assistant Professor, Washington State U.
509-335-4862, [email protected]

Dr. Guozhong Cao, University of Washington
206-616-9084