Are these conditions dependent on the plating solution composition?
Shay?
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of ???
Sent: Wednesday, November 19, 2008 1:51 AM
To: [email protected]
Subject: Re: [mems-talk] Cu electroplating uniformity problem
My research is about the uniformity control of electroplating.
There's one conclusion of my research paper:
The uniformity and profiles of electroplated nickel posts are controlled
mainly by plating current density and temperature. Optimal conditions of
8.05mA/cm2 and 20°C were obtained to fabricate flat cross-sectional profile
microstructures and a uniform thickness distribution across a specimen.