I've used the lower viscosity AZ40XT to coat and pattern 40um with good
results. I used the vendor recommendations except for a 30 sec longer PEB
(2nd one).

Here are the bake temps/times.

                        Time    Temp
Coat
Soft bake1              120S    100C
Soft bake2              120S    110C
Soft bake3              180S    125C
 Expose
PEB1                    20S     100C
PEB2                    120S    105C    vendor recommended 90S
Develop      4 puddles

This resist is chemically amplified so I think the 105 temp is fairly
critical.

Robert

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Haixin Zhu
Sent: Tuesday, November 18, 2008 5:26 PM
To: General MEMS discussion
Subject: [mems-talk] AZ50XT single coat

Dear all,

I am trying to have 60um thick AZ 50XT on top of quartz substrate, and
having some issues with the pattern undercut and film stress, is there
anyone who can provide a working recipe since the protocol from the
vendor seems not working well.

Appreciate the help