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MEMSnet Home: MEMS-Talk: Ti and Ni wet etching in HF
Ti and Ni wet etching in HF
2008-11-17
ANIRBAN SARKAR
2008-11-21
汪飞
2008-11-21
ANIRBAN SARKAR
2008-11-22
Jie Zou
2008-11-23
ANIRBAN SARKAR
anisotropic Ni etching
2008-11-23
Maria Matschuk
2008-11-24
Kvel Bergtatt
2008-12-03
Lou Chomas
2008-11-28
汪飞
2008-11-28
汪飞
2008-11-24
Samadhan B. Patil
2008-11-24
walter
2008-11-27
saravan kallempudi
Ti and Ni wet etching in HF
ANIRBAN SARKAR
2008-11-21
Yes! I'm talking about the glass wafer. Yes it is absolutely correct that HF
is extremely difficult to deal with glass substrates. Besides, the etching
of Nickel is extremely slow in HF as I have mentioned. So I am trying to
search out an ambient etchant for etching out out both Ni and Ti.

Your comment is highly appreciated.

Anirban

On Fri, Nov 21, 2008 at 6:18 AM, 汪飞  wrote:

> Hi,
>
> Are you talking about a glass wafer?  So, why do you want to use HF?
>

---ANIRBAN
Electrical Engineering
Louisiana State University
Baton Rouge
70802,USA
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