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MEMSnet Home: MEMS-Talk: Ti and Ni wet etching in HF
Ti and Ni wet etching in HF
2008-11-17
ANIRBAN SARKAR
2008-11-21
汪飞
2008-11-21
ANIRBAN SARKAR
2008-11-22
Jie Zou
2008-11-23
ANIRBAN SARKAR
anisotropic Ni etching
2008-11-23
Maria Matschuk
2008-11-24
Kvel Bergtatt
2008-12-03
Lou Chomas
2008-11-28
汪飞
2008-11-28
汪飞
2008-11-24
Samadhan B. Patil
2008-11-24
walter
2008-11-27
saravan kallempudi
Ti and Ni wet etching in HF
ANIRBAN SARKAR
2008-11-23
Hey Jie,

Thanks very much for the advice. I can replace Titanium by chromium.
Will the suggested Ni etchant attack Silicon substrate?
Thanks
Anirban

On Sat, Nov 22, 2008 at 5:13 PM, Jie Zou  wrote:

> Try some Ni etchants. I have one (Ni etchant TFB.
> http://microfabrication.colorado.edu/equipment/pdf%20files/ni_etchant.pdf)
> in my lab. It will not attack the glass, but I'm not sure how it performs
> for Ti.
>
> HF would definitely kill your glass substrate.
>
> Jie

---ANIRBAN
Electrical Engineering
Louisiana State University
Baton Rouge
70802,USA
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