Having a pure 30 um thick SiO2 layer on top of silicon is not
possible. Any known processes would take forever and produce very
stressy deposit that is likely to break your wafers, especially if you
want it on one side only. If you can use Pyrex or Borofloat glass
instead of pure SiO2 silicon and glass wafers can be bonded together
and then polished to target thickness.

On Fri, Nov 21, 2008 at 3:54 AM,   wrote:
> hi
>   Does anyone know how can i either deposite or grow thick layer of SiO2
> about 30 micron ??
> --
> Kamlesh Pawar