Dear all,

I also need to etch nickel but I would need to have an anisotroic etch to
achieve high aspect ratios (at least higher than 1). Is there a dry or wet etch
process?

Kind Regards
Maria

________________________________

From: [email protected] on behalf of ANIRBAN SARKAR
Sent: Sun 11/23/2008 7:35 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Ti and Ni wet etching in HF

Hey Jie,

Thanks very much for the advice. I can replace Titanium by chromium.
Will the suggested Ni etchant attack Silicon substrate?
Thanks
Anirban