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MEMSnet Home: MEMS-Talk: EBL on the glass substrate
EBL on the glass substrate
2008-11-25
li shifeng
2008-11-26
indusekhar h
2008-11-26
Morten Aarøe
2008-11-26
Maria Matschuk
2008-11-26
Aron Michael
2008-11-30
zeusshang
EBL on the glass substrate
li shifeng
2008-11-25
Hi, guy

I'm trying to write some patterns on glass substrate. Here is my process:

Spin coat 500nm PMMA 950 C4,
Sputtering 5nm gold
EBL exposure
Strip gold using TFA gold etcant for 6 second
Develop in MIBK : IPA= 1:3 for 30 sec

The problem is I cannot find any pattern on the substrate afterwards. What are
the possible reasons for that?  Anyone have similar experiences on this or has a
working recipe to share?

Thanks!
reply
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