You need chromium as an adhesion layer before you sputter gold.

On 25/11/2008, at 3:12 PM, li shifeng  wrote:

Hi, guy

I'm trying to write some patterns on glass substrate. Here is my process:

Spin coat 500nm PMMA 950 C4,
Sputtering 5nm gold
EBL exposure
Strip gold using TFA gold etcant for 6 second
Develop in MIBK : IPA= 1:3 for 30 sec

The problem is I cannot find any pattern on the substrate afterwards. What are
the possible reasons for that?  Anyone have similar experiences on this or has a
working recipe to share?