Many years ago I used to spray photo resist to get 20 microns thick.
Your thickness I do not know.  I did some work with a company that put
down 200 microns thick SU8 and we were trying to strip this thickness.
It takes hours.  Best of luck patterning it.
Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

www.yieldengineering.com

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of A. AhmadShukri
Sent: Wednesday, November 26, 2008 11:31 AM
To: General MEMS discussion
Subject: [mems-talk] very thick layer of SU-8

Hi all--

I am wondering if anyone knows how I can deposit a 2mm (yes, 2,00um)
layer of SU-8 and pattern it.

Thanks,

Aimi Ahmad-Shukri