Hi, Aimi

I am working on SU-8 PR. I found it very difficult to get a good patterns if
the SU-8 layer was thicker than 50 micron. A photo filter may be needed
which can cut off the UV light with the wavelegth blew 360nm. And also a
small pattern may be difficult.

good luck.


2008/11/27 A. AhmadShukri 

> Hi all--
>
> I am wondering if anyone knows how I can deposit a 2mm (yes, 2,00um) layer
> of SU-8 and pattern it.
>
> Thanks,
>
> Aimi Ahmad-Shukri

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赵亮
南京大学化学化工学院
Liang Zhao
School of Chemistry and Chemical Engineering, Nanjing University