Hello,

Try casting and flycutting to achieve that thickness.

One group in Louisiana state university have done the ultrathick su-8 layer
process with casting.

Of course, you can try multilayer spin coating, but the control of solvent
content will be a big problem for such a thick layer.

good luck

On Thu, Nov 27, 2008 at 5:31 AM, John Hilton  wrote:

> You could always deposit and pattern several layers of whatever max
> thickness you can achieve (e.g. 4 layers of 500um thick using SU-8
> 2150).
>
> On Wed, Nov 26, 2008 at 2:31 PM, A. AhmadShukri
>  wrote:
> > Hi all--
> >
> > I am wondering if anyone knows how I can deposit a 2mm (yes, 2,00um)
> layer
> > of SU-8 and pattern it.
> >

--
Best Regards,

郑瑞麟

Ruilin Zheng

Address:
Pen-Tung Sah MEMS Research Center,
Xiamen University, Xiamen,361005,
P.R.China