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MEMSnet Home: MEMS-Talk: Ti and Ni wet etching in HF
Ti and Ni wet etching in HF
2008-11-17
ANIRBAN SARKAR
2008-11-21
汪飞
2008-11-21
ANIRBAN SARKAR
2008-11-22
Jie Zou
2008-11-23
ANIRBAN SARKAR
anisotropic Ni etching
2008-11-23
Maria Matschuk
2008-11-24
Kvel Bergtatt
2008-12-03
Lou Chomas
2008-11-28
汪飞
2008-11-28
汪飞
2008-11-24
Samadhan B. Patil
2008-11-24
walter
2008-11-27
saravan kallempudi
Ti and Ni wet etching in HF
汪飞
2008-11-28
I have not tried with any specific Nickle etchant. I used Au etchant (KI)
once to etch out the electroplated nickel and it worked pretty well. As the
Ti, H2P2 could be a good choice. Both of the two solution are safe for
silicon substrate.

2008/11/23 ANIRBAN SARKAR 

> Hey Jie,
>
> Thanks very much for the advice. I can replace Titanium by chromium.
> Will the suggested Ni etchant attack Silicon substrate?
> Thanks
> Anirban

--
Best regards,
Yours sincerely
Fei Wang
reply
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