Hi

What it the thickness of PMMA  layer ? If it is too thick you may have to
use higher dose to get your patterns delineated.

Wish you good luck.

Indusekhar

________________________________

From: li shifeng [mailto:[email protected]]
Sent: Wed 11/26/2008 10:19 PM
To: [email protected]
Subject: [mems-talk] EBL on the glass (more details)



Hi, All

I posted a message about EBL on the glass substrate couple days ago. I got s=
everal valuable replys. In order to get more help, I would like to talk a bi=
t of detail about my case.

I try to write patterns on the glass substrate. In order to get rid of surfa=
ce charge problem, I sputtered 5nm gold on the top of PMMA. I used 30KV ebea=
m to expose the patterns. Meanwhile, I used multiple dosage to find the opti=
mal exposure parameters. The dose factors I used are 1, 1.5, 2.0, 2.5, 3.0.=
 After exposure, I have to strip gold layer to develop PMMA.  I put some lar=
ge features in the design so that I can easly identify the position of the p=
atterns. But, after development, I cannot find any patterns on the glass sub=
strate. I may believe this maybe due to underexposure because the layer of g=
old may absorb some electrons during exposure.

I am looking for any experiences similar like my case or any working receipe=
 to share.

Thanks!