Hello!

I'm looking for a cost effective method to create a mask with feature size of
about 0.2~0.5 um.
Would a chrome mask do the job?

Also, the channel depth I'm trying to fabricate is around 2~5 um, which is
approximately 10 times larger than the width of the channel.
With the appropriate mask, would I be able to fabricate the channel using soft
lithography? (I have access to contact mode lithography equipment)

Thank you!