Increase exposure a lot more.
Develop with AZ 1:3.

It should work.

Good luck


On Tue, Dec 2, 2008 at 12:05 PM, Hyun C Jung  wrote:

> This is my parameters for AZ 9260.
>
> 1. Spin coat AZ 9260 at 3000 rpm for 1 min.
> 2. Soft bake for 90s
> 3. Expose 15s i-line4
> 4. Develop 3 min in AZ 400k 1:4