Hello Andrea

Are you looking for an isotropic or anisotropic etch. XeF2 can be used to dry
etch Ge isotropically.  If you would like to try it please let me know and we
can run some samples at XACTIX.

Regards

David Springer
XACTIX Inc.
2403 Sidney St.
Suite 300
Pittsburgh, PA 15203
Tel: 412 381 3915
Fax: 412 381 1136

> Hi All,

> Is there anyone able to realize germanium dry etch ?

> Best regards,
> Andrea