Hi Andrea,
A CF4 dry etch removes thermally deposited (amorphous) Ge very quickly,
but I seem to recall that you're after a through-hole via in a
crystalline Ge substrate. So it's worth a try, but no guarantees.

Jason Milne


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Andrea Mazzolari
Sent: Wednesday, 3 December 2008 5:15 PM
To: 'General MEMS discussion'
Subject: [mems-talk] Germanium dry etch

Hi All,

Is there anyone able to realize germanium dry etch ?

Best regards,
Andrea