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MEMSnet Home: MEMS-Talk: Germanium dry etch
Germanium dry etch
2008-12-03
Andrea Mazzolari
2008-12-03
David Springer
2008-12-04
Jason Milne
2008-12-04
Andrea Mazzolari
2008-12-04
Kumar, Parshant
2008-12-05
Andrea Mazzolari
2008-12-05
SEBESTA Edward
Germanium dry etch
Andrea Mazzolari
2008-12-04
Yes Jason,

i need to realize passing holes in germanium wafers of thickness 500um. In
the case they are too thick, i can accept to reduce the thickness to
100-200 um

Thanks,
Andrea

> Hi Andrea,
> A CF4 dry etch removes thermally deposited (amorphous) Ge very quickly,
> but I seem to recall that you're after a through-hole via in a
> crystalline Ge substrate. So it's worth a try, but no guarantees.
>
> Jason Milne
>
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