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MEMSnet Home: MEMS-Talk: Germanium dry etch
Germanium dry etch
2008-12-03
Andrea Mazzolari
2008-12-03
David Springer
2008-12-04
Jason Milne
2008-12-04
Andrea Mazzolari
2008-12-04
Kumar, Parshant
2008-12-05
Andrea Mazzolari
2008-12-05
SEBESTA Edward
Germanium dry etch
Kumar, Parshant
2008-12-04
Hi,
You could try laser drilling for through wafer holes.

Good luck
Parshant
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