Now, there is probably a good reason for this, but why only 500nm of
resist?

I am doing similar work, and RIE etching 1µm through a device layer with
1.5µm AZ resist hasn't caused any problems.

// Morten

[email protected] wrote:
> Hello all,
>
> I have just started working with SOI wafers and I just come across my
> first frustrating problem:
>
> I can't etch with our RIE two SOI wafers, and I have to.
> Strange, but I etched other SOI wafers (with different device layer
> thickness) and bare silicon wafers without problems with the same RIE
> recipe.
>
> But, when I try with these two wafers, the etching rate decreases as
> much as ten times, and then the resist thickness is not enough to etch
> the device layer.
>
> The device layer is 300 nm thick of silicon.
>
> I tested different parameters:
>
> SF6: from 7 to 26 sccm (and also with small amounts of O2 and Ar, but
> they decreased the selectivity),
> RF Power: from 20 to 75 W,
> Pressure: from 0.02 mbar to 0.2 mbar (= 15-150 mtorr).
> Resist: 500 nm ZEP520 (I also tried PMMA, but the selectivity was worst)
>
> In the deepest etch, I only get 200 nm etch before the resist
> disappears.
>
> The recipe should work for 300 nm Silicon, so I started to suspect that
> either something strange happens with the wafers, or I am missing
> something important in the procedure.
>
> Until now I worked with the wafers without cleaning (just as clean as
> they come from the box). Do you think that this could be the problem?
> Should I clean them with acid before processing? How?
> Do you think that it is possible that a thin film of oxide, or
> whatever, in the surface of the wafer could be the problem? Or do you
> think that the cause could be another reason?
>
> I would appreciate any suggestion, because I really need to etch these
> wafers.
>
> Thanks,
> Jose Marques