One way of getting the desired surface state but still use plasma or
other damaging etch methods is to do the etch with plasma, and then do a
wet chemical etch to take the surface off.

Ed

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Andrea Mazzolari
Sent: Friday, December 05, 2008 2:29 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Germanium dry etch

Hi,

i need to use only chemical methods, because i need that the sidewalls
be of perfect crystalline quality.

Best regards,
Andrea

> Hi,
> You could try laser drilling for through wafer holes.
>
> Good luck
> Parshant