We have the same problem using essentially the same process.  We don't
do electroplating, but the 200 deg cured SU-8, 10 um thick, does not
release from the OmniCoat.  We tried warm NanoRemover PG in ultrasonic
bath for several hours.  The OmniCoat layer is 20-30 nm thick using
MicroChem recommended spin process.  We thick this is too thin.  What
methods will spin coat thicker layers of OmniCoat?  What process would
increase OmniCoat viscosity?

Don Friedrich
Research & Development
JDSU - Advanced Optical Technologies

2789 Northpoint Parkway, M.S. BF-1
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707-525-7258 (Voice)
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