Hi Don,

some time ago I had a discussion about this topic at a conference. The
guy I was talking to had good experience with multiple Omnicoat coating
steps, perhaps 3 or 4 layers. I never tried it myself, though.

Marc Hennemeyer
_________________________________
Application Engineer
SUSS MicroTec Lithography GmbH
phone +49-(0) 89-32007-128



-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Don Friedrich
Sent: Thursday, December 11, 2008 11:51 PM
To: General MEMS discussion
Subject: [mems-talk] SU-8 removal

We have the same problem using essentially the same process.  We don't
do electroplating, but the 200 deg cured SU-8, 10 um thick, does not
release from the OmniCoat.  We tried warm NanoRemover PG in ultrasonic
bath for several hours.  The OmniCoat layer is 20-30 nm thick using
MicroChem recommended spin process.  We thick this is too thin.  What
methods will spin coat thicker layers of OmniCoat?  What process would
increase OmniCoat viscosity?

Don Friedrich