Hello all,
i need to spin and pattern a 10um thick S1813 photoresist. I've searched
for optimal parameters in the S1813 datasheet but could not find anything
which could help in this direction.
Is there someone who already have done this ?

If it is not possible to achieve such thick S1813 layer, are there other
photoresists which can provide this thickness and that are compatible with
a bosch process ?

Best regards,
Andrea