hi all,

we are working on a MEMS device that requires use of a resistor, of the order of
50Kohms. could some one suggest wats the best way to incorporate a resistor in
MEMS?? I looked into thin film resistors, also, there is conductive SU-8 .Any
suggestions will be helpful. please let me know if you need for info on the
device, I can attach a rough sketch too.

regards
Vaibhav Mathur
Photonics center
UMass Lowell