Also, see Flat and Corrugated Diaphragm Design Handbook, by Mario Di
Giovanni.
This only applies to membrane-based pressure sensors. There is an
Russian/Israeli treatise which also deals with more complicated boundary
conditions for membrane mechanics (Andreeva, Elastic Elements of
Instruments).
Of course, non-membrane pressure sensors also exist, and behave
according to different physical and mathematical principles....
Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA 95008
408-379-9069 ext 101
[email protected]
-----Original Message-----
From: Roger Shile
Sent: Friday, January 02, 2009 9:51 AM
To: General MEMS discussion
Subject: Re: [mems-talk] mems based pressure sensor
Try F = MA