We used vanadium oxide as thermistor material for MEMS style calorimeter arrays,
see a.o. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4300493

There are many different vanadium oxides (and phases) and ways of depositing
thin films of it. We deposited vanadium pentoxide by reactive sputtering of
vanadium in a mixed argon/oxygen environment. More info in the paper; or do a
search and follow the links in Google Scholar to more of our publications.

It is easily patterned by wet etching (try a solution of hydrogen peroxide), or
lift-off.

Dirk De Bruyker
Palo Alto Research Center


-----Original Message-----

Hello I'm interested in fabricating a microbolometer electromagnetic
radiation detector.

Extensive research shows that vanadium oxide is one of the best
materials to use for such a device.

I'm interested if anyone has information on the deposition and
patterning of  Vanadium Oxide.

Any advice much appreciated.

Many thanks,

Dr. James Paul Grant