I would like to know how to develop recipes for descum and ashing of 3000PY
and 1813 resists on Alumina and MgO substrates using any type of equipment.
I know both processes are used for residue cleaning but I would like to know
how to develop the recipe myself.  In other words, how to select the power
level (W), Volumetric Flow Rate (sccm), duration (minutes), pressure (mT),
etc. as applicable to a system.

Thanks,


EVELYN BENABE
Graduate Research Assistant
RF Microsystems Research Group
University of South Florida
4202 East Fowler Avenue
Tampa, FL 33620
Office: ENB 412
Office Phone: (813)-974-4851
Email: [email protected]