Thanks for the prompt response.  What kind of system are you using for
descum and ashing?

Evelyn

On Sun, Jan 18, 2009 at 8:54 PM, Kagan Topalli  wrote:

> Dear Evelyn,
>
> For descum of S1813;  300 W, 300 mT, 30 secs works well.
> The lower powers should also work if you increase the duration.  You can
> also try 150 W, 300 mT, 1 min.
>
> For ashing of S1813; you may increase the power level to 500 W if possible.
> You can increase the pressure to 600 mT.  The duration may change according
> to the thickness of the photoresist, but 30 minutes will be OK if you apply
> 300 W.

EVELYN BENABE
Graduate Research Assistant
RF Microsystems Research Group
University of South Florida
4202 East Fowler Avenue
Tampa, FL 33620
Office: ENB 412
Office Phone: (813)-974-4851
Email: [email protected]