Hello James,

Both should work fine - it depends on the size of your features of course, and
how comfortable/easy it is for you to achieve an inverted resist profile that
accommodates the lift-off (preventing rough edges etc). To give you another
option: I just remember you can also easily etch VOx dry, in a plasma etcher,
with e.g. a mixture of oxygen and CF4 as process gases.

Dirk De Bruyker
Palo Alto Research Center



-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of James Paul Grant
Sent: Friday, January 16, 2009 2:15 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Vanadium Oxide

Hello Dirk,

Many thanks for your response. I shall have a look at your papers.

I'd like to fabricate a serpentine resistor in Vanadium Oxide; would you
advise me to do this via lift-off or wet/dry etching? I'm leaning
towards lift-off, since it is slightly simpler.

We have the capabilities here at Glasgow to deposit Vanadium Pentaoxide
in the exatc same fashion as you have done.

Dr. James Paul Grant