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MEMSnet Home: MEMS-Talk: Material Properties of Polysilicon
Material Properties of Polysilicon
1998-09-18
Tommy Roussel
Material Properties of Polysilicon
Tommy Roussel
1998-09-18
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I was wondering if anyone could give me the material properties of
polysilicon.  I have found the pre-formed properties (solubility, etc) but
can't seem to locate Young's modulus or Poisson's ratio.

Thanks,

Tommy Roussel
[email protected]
http://www.ifm.latech.edu

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I was=20 wondering if anyone could give me the material properties of = polysilicon. =20 I have found the pre-formed properties (solubility, etc) but can't seem = to=20 locate Young's modulus or Poisson's ratio.
 
Thanks,
 
Tommy = Roussel
[email protected]
http://www.ifm.latech.edu
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