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MEMSnet Home: MEMS-Talk: atomic planes alignement in SIMOX wafers
atomic planes alignement in SIMOX wafers
2009-02-06
Andrea Mazzolari
atomic planes alignement in SIMOX wafers
Andrea Mazzolari
2009-02-06
Hi all,
i need to check that atomic planes in device and box layer of a simox
wafer are alligned with accuracy of 0.3 A (0.3 Amstrongs).
>From an intuitive point of view i'm expecting that they are perfectly alligned.
Any suggestion about an experimental tecnique which may provide answer to
this problem ?

Best regards,
Andrea

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