On glass, a dehydration bake improves adhesion. I assume the same is true with
sapphire, though I've never used it.

On glass, you can also use hexamethyldisilazane (HMDS) to further improve
things. You can either use a spin on coating (for an okish layer of HMDS) or
vacuum bake / vapor prime coating, from a YES oven, for example, if you want
something more controllable. Most likely, there's a little bottle of HMDS
sitting by the spinner in your cleanroom.

- Kevin Nichols

-----Original Message-----
From: [email protected] on behalf of Evelyn B
Sent: Sat 2/7/2009 5:00 PM
To: General MEMS discussion; Evelyn Benabe
Subject: [mems-talk] Dehydration bake

I have seen dehydration bakes used as part of solvent cleaning of glass and
sapphire substrates. What is the purpose/advantage of this bake?