I would guess it is to remove all of the solvents that have been
absorbed in the cleaning.  Also a dehydration bake is an excellent start
to resist adhesion.  Bill Moffat

________________________________

From: [email protected] on behalf of Evelyn B
Sent: Sat 2/7/2009 8:00 AM
To: General MEMS discussion; Evelyn Benabe
Subject: [mems-talk] Dehydration bake


I have seen dehydration bakes used as part of solvent cleaning of glass and
sapphire substrates. What is the purpose/advantage of this bake?

EVELYN BENABE