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MEMSnet Home: MEMS-Talk: Ti layer measurement...
Ti layer measurement...
2009-02-09
Javier Crespo
2009-02-09
Jie Zou
2009-02-09
Evelyn B
2009-02-13
Albert Henning
2009-02-13
Brian Stahl
2009-02-13
Rick Williston
2009-02-17
Albert Henning
2009-02-18
Fei Wang
2009-02-18
Wilson, Thomas
2009-02-18
Kirt Williams
2009-02-18
Mehmet Aykol
Ti layer measurement...
Javier Crespo
2009-02-09
Dear All,

I want to deposit a Titanium layer to a silicon wafer by sputtering. The
layer is about 100nm, but I don't know how to measure it. Does anyone
know how could I measure the Ti thickness?

Thanks,

Xabier

reply
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