Make a pattern by photoresist. Then measure the step profile of the lift-off
pattern by a profilometer.

Looking forward to other answers.

Jie

On Mon, Feb 9, 2009 at 11:15 AM, Javier Crespo
wrote:

> Dear All,
>
> I want to deposit a Titanium layer to a silicon wafer by sputtering. The
> layer is about 100nm, but I don't know how to measure it. Does anyone
> know how could I measure the Ti thickness?
>
> Thanks,
>
> Xabier

*  Zou Jie (Jay)
*  Department of Physics
*  University of Florida
*  Tel: +1-352-846-8018
*  Email: zoujiepku@gmail.com
*  Homepage: http://plaza.ufl.edu/zoujie/