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MEMSnet Home: MEMS-Talk: Silicon_Glass Fusion Bonding
Silicon_Glass Fusion Bonding
2009-02-10
jingru zhang
2009-02-10
Joseph Grogan
2009-02-10
jingru zhang
2009-02-10
Bill Moffat
2009-02-10
Xiaoguang Liu
2009-02-10
Bill Moffat
2009-02-10
jingru zhang
2009-02-11
Shay Kaplan
2009-02-11
Joseph Grogan
2009-02-12
Brubaker Chad
2009-02-12
shay kaplan
2009-02-12
Gareth Jenkins
2009-02-12
Roger Shile
2009-02-13
jingru zhang
2009-02-13
Roger Shile
2009-02-13
Reza Rashidi
2009-02-13
Joseph Grogan
Silicon_Glass Fusion Bonding
Shay Kaplan
2009-02-11
Make sure the substrates are perfectly clean before you attach them

Shay


-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of jingru zhang
Sent: Wednesday, February 11, 2009 1:33 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Silicon_Glass Fusion Bonding

Hi Bill,

Thank you for your information. We have nitrogen plasma and Oxygen plasma
here, and I will try plasma treatment next time.



reply
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