A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: E-beam direct patterning of SAM layer on ITO coated glass substrates
E-beam direct patterning of SAM layer on ITO coated glass substrates
2009-02-12
li shifeng
E-beam direct patterning of SAM layer on ITO coated glass substrates
li shifeng
2009-02-12
Hi, All

I've read literature that talks about E-beam direct patterning of SAM layer on
the silicon substrates. I am just wondering if I can do similar patterning on
the ITO coated glass substrates.

Has anyone done similar research or have any comments?

Thanks!
shifeng
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
The Branford Group
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing