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MEMSnet Home: MEMS-Talk: Silicon_Glass Fusion Bonding
Silicon_Glass Fusion Bonding
2009-02-10
jingru zhang
2009-02-10
Joseph Grogan
2009-02-10
jingru zhang
2009-02-10
Bill Moffat
2009-02-10
Xiaoguang Liu
2009-02-10
Bill Moffat
2009-02-10
jingru zhang
2009-02-11
Shay Kaplan
2009-02-11
Joseph Grogan
2009-02-12
Brubaker Chad
2009-02-12
shay kaplan
2009-02-12
Gareth Jenkins
2009-02-12
Roger Shile
2009-02-13
jingru zhang
2009-02-13
Roger Shile
2009-02-13
Reza Rashidi
2009-02-13
Joseph Grogan
Silicon_Glass Fusion Bonding
Roger Shile
2009-02-12
The first time I did an anodic bond I used a hot plate and DC power
supply that were lying around.  Just to be cute I used a coat hanger as
an anode.

The bonds were as good as what I get now using a very high priced
commercial bonder.  I still get a lot of laughs over that hot plate and
coat hanger.

Roger

-----Original Message-----

I would think direct fusion bonding in a standard lab furnace would be
difficult because of the differences in glass transition temperatures and
coefficients of thermal expansion between glass and silicon.
However, during my PhD days, I recall another student who reported making
his own anodic bonding setup with a hotplate and a HV power supply. He
reported success with bonding silicon to glass but unfortunately I never saw
the setup or have any more detailed knowledge of what he did! From my
limited knowledge of anodic bonding I believe you will need around 1kV DC,
about 500degC and glass with sodium ions (e.g. soda-lime).
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