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MEMSnet Home: MEMS-Talk: Silicon_Glass Fusion Bonding
Silicon_Glass Fusion Bonding
2009-02-10
jingru zhang
2009-02-10
Joseph Grogan
2009-02-10
jingru zhang
2009-02-10
Bill Moffat
2009-02-10
Xiaoguang Liu
2009-02-10
Bill Moffat
2009-02-10
jingru zhang
2009-02-11
Shay Kaplan
2009-02-11
Joseph Grogan
2009-02-12
Brubaker Chad
2009-02-12
shay kaplan
2009-02-12
Gareth Jenkins
2009-02-12
Roger Shile
2009-02-13
jingru zhang
2009-02-13
Roger Shile
2009-02-13
Reza Rashidi
2009-02-13
Joseph Grogan
Silicon_Glass Fusion Bonding
Reza Rashidi
2009-02-13
Hi Roger,

I am wondering how long do you wait to make sure bonding is perfect. How much
energy do you consider for the process and how do you calculate the required
time?
Thanks,

Reza

________________________________
From: jingru zhang 
To: General MEMS discussion 
Sent: Friday, February 13, 2009 8:35:54 AM
Subject: Re: [mems-talk] Silicon_Glass Fusion Bonding

Hi Roger,

Would you please specify the voltage that you used for bonding? Is that the
same as Gareth mentioned? Thank you.

On Thu, Feb 12, 2009 at 5:31 PM, Roger Shile  wrote:

> The first time I did an anodic bond I used a hot plate and DC power
> supply that were lying around.  Just to be cute I used a coat hanger as
> an anode.
>
> The bonds were as good as what I get now using a very high priced
> commercial bonder.  I still get a lot of laughs over that hot plate and
> coat hanger.
>
> Roger

--
Jingru
reply
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