A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Cr/Au as a mask for KOH etch
Cr/Au as a mask for KOH etch
2009-02-18
İlker Comart
2009-02-18
Mehmet Aykol
2009-02-19
[email protected]
2009-02-19
jian zi
2009-02-19
[email protected]
2009-02-21
杨永亮
Cr/Au as a mask for KOH etch
jian zi
2009-02-19
hi,

It can be the mask. I use 500 A Cr and 2500 A Au. 30% KOH 60 degree C. At least
17 hour, no observable attack to the metal system.

Zhijian ZHOU
HKUST

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
The Branford Group
Nano-Master, Inc.
Mentor Graphics Corporation