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MEMSnet Home: MEMS-Talk: Cr/Au as a mask for KOH etch
Cr/Au as a mask for KOH etch
2009-02-18
İlker Comart
2009-02-18
Mehmet Aykol
2009-02-19
[email protected]
2009-02-19
jian zi
2009-02-19
[email protected]
2009-02-21
杨永亮
Cr/Au as a mask for KOH etch
[email protected]
2009-02-19
I have tried chromium as a mask directly over silicon with no luck.
However, if there is an oxide layer underneath, it works great.

>
> It can be the mask. I use 500 A Cr and 2500 A Au. 30% KOH 60 degree C. At
> least 17 hour, no observable attack to the metal system.
>
> Zhijian ZHOU
> HKUST
>
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