A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Residue removal after Si DRIE
Residue removal after Si DRIE
2009-03-03
Taekyung Kim
Residue removal after Si DRIE
Taekyung Kim
2009-03-03
Hello folks,

Is there any way to remove residue after Si DRIE (Bosch etching) with dry
etching method?

Thanks
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
MEMStaff Inc.
Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics