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MEMSnet Home: MEMS-Talk: Looking for mask to make holes in glass
Looking for mask to make holes in glass
2009-03-04
Moshe
2009-03-04
John Dangtran
2009-03-06
Albert Henning
2009-03-04
Mehmet Aykol
2009-03-04
Andrea Mazzolari
2009-03-04
Hanson, Steve
2009-03-06
Zhao Lu
2009-03-09
Mikael Evander
2009-03-05
Moshe
2009-03-05
walter
2009-03-05
Fei Wang
2009-03-06
Morten Aarøe
2009-03-06
Pat Kayatta
2009-03-06
akshdeep sharma
Looking for mask to make holes in glass
walter
2009-03-05
Moshe

At the best it is problematic in glass versus Silicon with KOH.
We use a powder blasting method after giving up on the marginal results that
wet etching produced
Dov
[email protected]

----- Original Message -----
From: "Moshe" 
To: "General MEMS discussion" 
Sent: Wednesday, March 04, 2009 10:08 PM
Subject: Re: [mems-talk] Looking for mask to make holes in glass

> Thank you for all the answers
> I prefer to focus on a way to made holes with wet etch.
> I there a resist so the HF do not strip it ?
> As I said I tried gold and polysilicon and the HF strip it.
reply
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