Need PhD dissertations on Microaccelerometers from
Univ. of Michigan
Micro Sense
2009-03-11
Dear MEMS Community,
I was looking for the following PhD dissertations from the Univ. of Michigan
on microaccelerometers:
1.
Arvind Salian, Design, Fabrication and Testing of High-Performance
Capacitive Microaccelerometers
2.
Farrokh Ayazi, A High-Aspect-Ratio Tactical/Inertial Grade Polysilicon
Vibrating Ring Gyroscope
3.
Arjun Selvakumar, A Multifunctional Silicon Micromachining Technology for
MEMS Applications
I would appreciate if any of you have access to any of the above documents
would send it/them to my e-mail id: microsenz-at-gmail-dot-com
Many thanks in advance.
Vijay
TU Delft