Try a reducing gas plasma, for safety do not use 100% Hydrogen.

Bill Moffat

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From: [email protected] on behalf of Yoshi Sakata
Sent: Thu 3/12/2009 9:50 PM
To: General MEMS discussion
Subject: [mems-talk] Gold Oxide



Hi All,

I'm trying to clean the Pyrex wafers with NH4OH + H2O2. The wafer has
the Au/Ti film on the surface. I have the oxide or something on the
surface of Au. So it is very difficult for me to have the electrical
contact with the surface of Au. Does anybody know what is on the
surface of Au, how I can remove this oxide?

Regards,
Yoshi