Yoshi,

Oxygen plasma can oxidize the surface of gold.  If that's what you have,
then 15 seconds in BOE or 30 seconds in an SF6 plasma will etch the oxide.

If that's not what you have, then you'll have to do XPS or some other
chemical analysis to try to identify it.

Gabriel


---------- Forwarded message ----------
> From: Yoshi Sakata 
> To: General MEMS discussion 
> Date: Fri, 13 Mar 2009 13:50:25 +0900
> Subject: [mems-talk] Gold Oxide
> Hi All,
>
> I'm trying to clean the Pyrex wafers with NH4OH + H2O2. The wafer has
> the Au/Ti film on the surface. I have the oxide or something on the
> surface of Au. So it is very difficult for me to have the electrical
> contact with the surface of Au. Does anybody know what is on the
> surface of Au, how I can remove this oxide?
>
> Regards,
> Yoshi